Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Plasma-enhanced atomic layer deposition of silicon nitride thin films using bis(diethylamino)silane

Jae-Min PARK ,  Yong-Ho NOH ,  June HWANG 외 1명

한국진공학회 학술발표회초록집

2016 .08

Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .02

Surface passivation and tunneling effects enabled by atomic layer deposition-Al₂O₃ for crystalline silicon solar cells

Hamcho ,  om CHA ,  Young Joon CHO 외 1명

한국진공학회 학술발표회초록집

2016 .08

고주파 (162 MHz) 분할전극 플라즈마 소스를 이용한 저수소 함량의 Silicon nitride (SiNx) 박막증착 및 PEALD 공정에 관한 연구

이승엽 ,  변지영 ,  김기석 외 3명

한국진공학회 학술발표회초록집

2019 .08

Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes

Sun Jung Kim ,  Seunghun Han ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Effects of Redeposition on Low-Temperature Plasma Enhanced-Atomic Layer Deposition of Silicon Nitride Thin films for the Encapsulation layer of flexible OLEDs

김지민 ,  김성민 ,  김형준

한국진공학회 학술발표회초록집

2018 .02

Plasma enhanced atomic layer deposition of silicon nitride films using a VHF (162 ㎒) multi-tile push-pull plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .08

Enhanced silicon surface passivation of atomic layer deposited Al₂O₃ films with surface treatment

Ham Cho Rom Cha ,  Hyo Sik Chang

한국진공학회 학술발표회초록집

2018 .02

An easily accessible method for DNA immobilization on silicon surfaces

트란티중 ,  호앙힙 ,  김문일

한국진공학회 학술발표회초록집

2017 .08

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

The study for surface passivation effects of tunnel oxide by using atomic layer deposition-Al₂O₃ for crystalline silicon solar cells

Ham Cho Rom Cha ,  Young Joon Cho ,  Hyo Sik Chang

한국진공학회 학술발표회초록집

2017 .02

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Hafnium oxide thin films by atomic layer deposition using a novel Hf metallorganic precursor

Seungmin Yeo ,  Ga Yeon Lee ,  Taeyong Eom 외 6명

한국진공학회 학술발표회초록집

2020 .08

Mechanical Properties of High Stressed Silicon Nitride Beam Measured by Quasi-static and Dynamic Techniques

Dong Hoon Shin ,  Hakseong Kim ,  Ki 외 8명

한국진공학회 학술발표회초록집

2016 .02

Quantitative control of the surface chemistry of magnetron-deposited silicon nitride etched with various wet treatments

Ma ,  ine BRUNET ,  Damien AUREAU 외 7명

한국진공학회 학술발표회초록집

2016 .08

Investigation of MIM capacitor in dielectrics using cocktail precursor by atomic layer deposition

Jihyeok An ,  Jong-Ki An ,  Go 외 6명

한국진공학회 학술발표회초록집

2019 .08

Effect of layer deposition sequence for the cell characteristics of amorphous silicon thin film solar cells

Hyeonsung Kim ,  Junhee Jung ,  Junsin Yi

한국진공학회 학술발표회초록집

2015 .02

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08