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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.28 No.1
- 발행연도
- 2019.1
- 수록면
- 13 - 15 (3page)
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초록· 키워드
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Ga doped ZnO thin films were deposited with various base pressure by RF magnetron sputtering, and their structural, optical, and electrical properties were studied. Effects of base pressure on the properties of Ga doped ZnO thin films were confirmed and a high quality thin film was obtained by controlling the base pressure. In our case, as the base pressure decreases, the crystal ... 전체 초록 보기
목차
Abstract
I. Introduction
II. Experimental procedure
III. Results and discussions
IV. Conclusion
References
참고문헌 (19)
참고문헌 신청
H. K. Jeoung / 2016 / Effects of flow rate of oxygen and substrate temperature on the characteristics of IZO thin films for OLEDs / Journal of Ceramic Processing Research 17(4):281~285
F. Z. Ghomrani / 2015 / Energy Procedia 74:491
R. H. Hrong / 2017 / Opics Express 25:32206
H. W. Park / 2015 / Ceram. Inter 41:1641
Y. Hou / 2018 / Phys. Status. Solidi A 215:1800037
F. Z. Ghomrani / 2015 / Energy Procedia 74:491
R. H. Hrong / 2017 / Opics Express 25:32206
H. W. Park / 2015 / Ceram. Inter 41:1641
Y. Hou / 2018 / Phys. Status. Solidi A 215:1800037
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UCI(KEPA) : I410-ECN-0101-2019-420-001277324