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- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.30 No.3
- 발행연도
- 2021.5
- 수록면
- 92 - 94 (3page)
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In high current implantation, improving the ion extractability is a decisive factor contributing to the equipment efficiency and process cost reduction. A direct current filament ion source and inductively coupled plasma ion source were prepared to observe the degree of plasma extraction according to the ion source characteristics. The plasma parameters used to optimize beam extraction for the filament and RF discharges were 600 W, Ar 2 × 10<sup>-5</sup> Torr, and Ø200 × 250 mm discharge space. In the thermionic ion source, the ion density, electron temperature, and Bohm current density were 5 × 10<sup>9</sup> 1/cm<sup>3</sup>, ≥ 6 eV, and ≈ 3.5 A/m<sup>2</sup>, respectively. In the ... 전체 초록 보기
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참고문헌 (9)
참고문헌 신청
M. A. Lieberman / 2005 / Principles of Plasma Discharges and Materials Processing / John Wiley & Sons, Inc
B. Wolf / 1995 / Handbook of Ion Sources / CRC Press
I. G. Brown / 2004 / The physics and Technology of Ion Sources / WILEY-VCH Verlag GmbH & Co. KGaA
T. Kalvas / 2010 / Rev. Sci. Instrum 81:02B703
S. D. Kovaleski / 2006 / IEEE Trans. Plasma Sci 34:23
B. Wolf / 1995 / Handbook of Ion Sources / CRC Press
I. G. Brown / 2004 / The physics and Technology of Ion Sources / WILEY-VCH Verlag GmbH & Co. KGaA
T. Kalvas / 2010 / Rev. Sci. Instrum 81:02B703
S. D. Kovaleski / 2006 / IEEE Trans. Plasma Sci 34:23
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